Linear and Nonlinear Analysis of DC Biased Coupled Microbeams

Gyanadutta, S (2013) Linear and Nonlinear Analysis of DC Biased Coupled Microbeams. Masters thesis, Indian Institute of Technology Hyderabad.

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Abstract

Now-a-days, micro electro-mechanical system based sensors and actuators are widely used in almost every field due to their uncommon advantages over the conventional devices in terms of stability, accuracy, sensitivity and operating exibility etc. There are difierent mechanisms to increase the sensitivity as well as the frequency range of dynamic resonators. Frequency tuning due to an electrostatic effect, nonlinear mid-plane stretching, a thermo mechanical effect, etc., are some of the major techniques used to widen the operating frequency range of these devices. However, the majority of these techniques are applied to a single operation mode in an individual MEMS structure. But the tuning of different modes in an array of beams is of great interest which could possibly provide an idea to develop more sensitive as well as stable micro-resonators.

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