SPLIT BEAM LOW FORCE LOW LOSS CAPACITIVE HIGH FREQUENCY MEMS SWITCH ON QUARTZ FOR RECONFIGURABLE CIRCUITS

Sharma, A K and Gautam, A K and Dutta, Asudeb (2012) SPLIT BEAM LOW FORCE LOW LOSS CAPACITIVE HIGH FREQUENCY MEMS SWITCH ON QUARTZ FOR RECONFIGURABLE CIRCUITS. International Journal of Electrical and Electronics Engineering Research (IJEEER), 2 (4). pp. 1-12. ISSN 2250-155X

Full text not available from this repository. (Request a copy)

Abstract

This paper presents the novel capacitive high frequency MEMS switch design and fabrication in broad frequency band for reconfigurable circuits. This switch was designed for symmetric actuation so as the deflection is uniform with a very low pull-in force but having sufficient restoring force for stable operation. A unique single bias pad is used to bias the two actuation pads in order to provide the simplicity during implementation in system. In this work, capacitive shunt switch was developed using the customized process flow. The membrane structure was split into small strips to achieve low stress in the beam, complete sacrificial removal for good RF characteristics and minimization of the squeeze film damping effects. This configuration was developed for high spring constant keeping in view the restoring force requirement for smooth operation of the switch. The Quartz substrate was used for fabrication to exploit its properties for high frequency operation. As a result a low actuation voltage of 24.6V was achieved with an insertion loss of 0.24dB and return loss better than 22dB in the frequency range of 4-20GHz. The isolation of 37dB was achieved in the off state.

[error in script]

IITH Creators: