Simulation of thin film deposition profile on complex 2-D MEMS Structures
Singh, S S and Li, Y and Pal, Prem and et al, . (2014) Simulation of thin film deposition profile on complex 2-D MEMS Structures. In: 7th Asia-pacific Conference on Transducers and Micro-Nano Technology(APCOT), 29 June-2 July 2014, Daegu Korea.
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Item Type: | Conference or Workshop Item (Paper) | ||||
Subjects: | Physics | ||||
Divisions: | Department of Physics | ||||
Depositing User: | Library Staff | ||||
Date Deposited: | 13 Sep 2019 10:56 | ||||
Last Modified: | 13 Sep 2019 10:58 | ||||
URI: | http://raiithold.iith.ac.in/id/eprint/6247 | ||||
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