Frequency Analysis of Linearly Coupled Modes of MEMS Arrays

Kambali, P N and Swain, G and Pandey, Ashok Kumar (2016) Frequency Analysis of Linearly Coupled Modes of MEMS Arrays. Journal of Vibration and Acoustics, 138 (2). pp. 1-9. ISSN 1048-9002

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Abstract

Microelectromechanical system based arrays have been employed to increase the bandwidth and sensitivity of many sensors and actuators. In this paper, we present approximate model to tune the modal frequencies of in-plane and out-of-plane modes of each beam in an array of fixed-fixed beams under the effect of direct and fringing field forces. Subsequently, we apply Galerkin method based on single approximate mode to obtain the reduced order static and dynamic equations. Corresponding to a given dc voltage, we first solve static equations and then obtain the corresponding frequencies from the dynamic equation for single beam as well as arrays of multibeams. We compare the model with available experimental results. Later, we show the influence of different frequency tuning parameters such as the initial tensions, fringing field coefficients and the variable inter beam gaps between the microbeam and electrodes to control the coupling region and different modal freqencies of the beam. Finally, we obtain a compact model which can be used in optimizing the bandwidth and sensitivity of microbeams array.

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