Simulation of thin film deposition profile on complex 2-D MEMS Structures

Singh, S S and Li, Y and Pal, Prem and et al, . (2014) Simulation of thin film deposition profile on complex 2-D MEMS Structures. In: 7th Asia-pacific Conference on Transducers and Micro-Nano Technology(APCOT), 29 June-2 July 2014, Daegu Korea.

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IITH Creators:
IITH CreatorsORCiD
Pal, PremUNSPECIFIED
Item Type: Conference or Workshop Item (Paper)
Subjects: Physics
Divisions: Department of Physics
Depositing User: Library Staff
Date Deposited: 13 Sep 2019 10:56
Last Modified: 13 Sep 2019 10:58
URI: http://raiithold.iith.ac.in/id/eprint/6247
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