Simulation of thin film deposition profile on complex 2-D MEMS Structures

Singh, S S and Li, Y and Pal, Prem and et al, . (2014) Simulation of thin film deposition profile on complex 2-D MEMS Structures. In: 7th Asia-pacific Conference on Transducers and Micro-Nano Technology(APCOT), 29 June-2 July 2014, Daegu Korea.

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IITH Creators:	IITH Creators ORCiD Pal, Prem UNSPECIFIED
Item Type:	Conference or Workshop Item (Paper)
Subjects:	Physics
Divisions:	Department of Physics
Depositing User:	Library Staff
Date Deposited:	13 Sep 2019 10:56
Last Modified:	13 Sep 2019 10:58
URI:	http://raiithold.iith.ac.in/id/eprint/6247
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