Innovative Technique to Fabricate Cost Effective Micro bolometer Sensor using Front End Bulk Micro-machining

Chanda, Karthik (2015) Innovative Technique to Fabricate Cost Effective Micro bolometer Sensor using Front End Bulk Micro-machining. Masters thesis, Indian Institute of Technology Hyderabad.

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Abstract

Front end bulk micro machining is one of the proven techniques of making suspended micro-structures and is highly adapted due to its simple and cost effective way of fabricating the devices. We propose a novel geometric mask designs for achieving area efficient micro structures by front end Si bulk micro-machining. In this work we adapt the geometric mask design having a micro-structure between two rectangular openings. These openings are aligned at 45º to wafer prime flat of (100) silicon wafer and act as etch openings for front end bulk micro machining. However rectangular openings lead to high silicon area consumption which makes the process unworthy. Therefore we proposed different geometries to minimize area consumption for achieving the same dimension of suspended structure. All these different geometries are simulated using Intellisuite FABSIM based physical simulator. We have observed more than 28% reduction in foot print over literature reported design.

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