Novel Designs and simulations to fabricate Microbolometer sensor and Si microbridges using low cost approach

Mohanty, R (2014) Novel Designs and simulations to fabricate Microbolometer sensor and Si microbridges using low cost approach. Masters thesis, Indian Institute of Technology, Hyderabad.

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Abstract

Frontend bulk micro machining is one of the proven techniques of making suspended microstructures and is highly adapted due to its simple and cost effective way of fabricating the devices. We propose novel geometric mask designs for achieving area efficient microstructures by frontend Si bulk micromachining. In this work we adapt the geometric mask design having a microstructure between two rectangular openings. These openings are aligned at 45º to wafer prime flat of (100) silicon wafer and act as etch openings for frontend bulk micromachining. However rectangular openings lead to high silicon area consumption which makes the process unworthy. Therefore we proposed different geometries to minimize area consumption for achieving the same dimension of suspended structure. All these different geometries are simulated using Intellisuite FABSIM based physical simulator. We have observed more than 28% reduction in foot print over literature reported design. Here also we are reporting the development of low-cost uncooled infrared microbolometer detector, Where the Si itself is used as the infrared sensitive material. The process does not required any diffusion or electrochemical etch-stop technique as is required in traditional CMOS line microbolometer fabrication, rather we are reporting two ways of fabricating the device in which one of the fabrication is done by using only one mask with only front end bulk micro machining using anisotropic and isotropic wet etchants which minimizes the fabrication cost of the device drastically.

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