Browse by IITH Authors

Swarnalatha, V. and Purohit, S. and Pal, Prem and Sharma, R. K. (2022) Enhanced etching characteristics of Si{100} in NaOH-based two-component solution. Society of Micro and Nano Systems.

Mahesh, M.L.V. and Pal, Prem and Prasad, V.V. Bhanu and et al, . (2022) Fatigue and leakage current characteristics of lead free bilayer thin film structures. Ceramics International, 48 (7). pp. 9006-9013. ISSN 0272-8842

Mahesh, M. L. V. and Pal, Prem and Prasad, V. V. Bhanu and et al, . (2022) Improved Tunability and Energy Storage Density Properties of Low-Loss, Lead-Free (Ba0.50Sr0.50)TiO3 and Ba(Zr0.15Ti0.85)O3 Bilayer Thin Film Stacks. Journal of Electronic Materials, 51 (2). pp. 727-735. ISSN 0361-5235

Purohit, S and Swarnalatha, V and Pandey, Ashok Kumar and Sharma, R K and Pal, Prem (2022) Wet bulk micromachining characteristics of Si{110} in NaOH-based solution. Journal of Micromechanics and Microengineering, 32 (12). ISSN 0960-1317

Purohit, Soumya and Pal, Prem and Pandey, Ashok Kumar (2021) Comparative study of perforated microcantilevers for MEMS applications. In: 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 25 August 2021 through 27 August 2021, Paris.

Gupta, Arti and Pal, Prem and Sharma, Chandra Shekhar (2021) A Facile Way of Surface Texturing of Si{100} using KOH for Silicon Solar Cells. In: 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 25 August 2021 through 27 August 2021, Paris.

Rao, A. V. N. and Pal, P. and et al, . (2020) High Speed Silicon Wet Bulk Micromachining of Si{111} in KOH Based Solution. 2020 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2020 (913914).

Menon, P K and Ashok, Akarapu and Narasimha Rao, A V and Pandey, Ashok Kumar and Pal, Prem (2020) Effect of concentration change of 0.1% triton added 25 wt% TMAH during fabrication of deep cavities with mesa structures in SOI wafer. Microelectronic Engineering, 227. ISSN 111323

Menon, P. Krishna and Ashok, Akarapu and Rao, A.V. Narasimha and Pandey, Ashok Kumar and Pal, Prem (2020) Effect of concentration change of 0.1% triton added 25 wt% TMAH during fabrication of deep cavities with mesa structures in SOI wafer. Microelectronic Engineering, 227. p. 111323. ISSN 01679317

Swarnalatha, Veerla and Vismaya, Kanneri Thettiyappath and Pal, Prem and et al, . (2020) Etching Mechanism Behind the High-Speed Etching of Silicon in NH₂OH-added Alkaline Solutions. IEEJ Transactions on Sensors and Micromachines, 140 (1). pp. 24-30. ISSN 1341-8939

Akarapu, A and Pal, Prem and Pandey, Ashok Kumar and et al, . (2020) Experimental and Theoretical Analysis of Drag Forces in Micromechanical-Beam Arrays. Physical Review Applied, 13 (3). ISSN 2331-7019

Krishna Menon, P. and Pal, P. and et al, . (2020) High speed etching of silicon in KOH + NH 2 OH solution at lower temperatures for the fabrication of through holes in silicon wafer. Micro & Nano Letters, 15 (6). pp. 365-369. ISSN 1750-0443

Mahesh, M.L.V. and Pal, Prem and Prasad, V.V. Bhanu and James, A.R. (2020) Improved properties & fatigue resistant behaviour OF Ba(Zr0.15Ti0.85)O3 ferroelectric ceramics. Current Applied Physics, 20 (12). pp. 1373-1378. ISSN 15671739

Gupta, Arti and Pal, Prem and Sharma, Chandra Shekhar (2020) Pyramid textured Si{100} surface with low reflectivity in CMOS compatible solution. Micro & Nano Letters, 15 (15). pp. 1084-1088. ISSN 1750-0443

Swarnalatha, Veerla and Pal, Prem and Pandey, Ashok Kumar and et al, . (2020) Systematic study of the etching characteristics of Si{111} in modified TMAH. Micro & Nano Letters, 15 (1). pp. 52-57. ISSN 1750-0443

Rao, Avvaru Venkata Narasimha and Pal, Prem and Pandey, Ashok Kumar and et al, . (2019) Aging Effects of KOH+NH2OH Solution on the Etching Characteristics of Silicon. ECS Journal of Solid State Science and Technology, 8 (11). P685-P692. ISSN 2162-8769

Ashok, Akarapu and Pandey, Ashok Kumar and Pal, Prem and et al, . (2019) Design and analysis of microcantilever beams based on arrow shape. Microsystem Technologies. ISSN 0946-7076

Ashok, Akarapu and Nighot, Rohit Prakash and Sahu, Nagesh Kumar and et al, . (2019) Design and analysis of microcantilever beams based on arrow shape. Microsystem Technologies. ISSN 0946-7076 (In Press)

Gangele, Aparna and Akarapu, Ashok and Sharma, Chandra Shekhar and Pal, Prem and Pandey, Ashok Kumar (2019) Frequency analysis of hexagonal microbeam with 2D nanofiber mat. Materials Research Express. ISSN 2053-1591

Gangele, Aparna and Sharma, Chandra Shekhar and Pal, Prem and et al, . (2019) Frequency analysis of hexagonal microbeam with 2D nanofiber mat. Materials Research Express, 6 (8). 085631. ISSN 2053-1591

Pawar, V S and Menon, P K and Pal, Prem and et al, . (2019) Influence of scalloping on electrostatic forces in comb drive microdevices. ISSS Journal of Micro and Smart Systems. ISSN 2509-7989

Avvaru, V N and Pal, Prem (2019) Investigation of High Speed Silicon Wet Bulk Micromachining in KOH-based Solution. PhD thesis, Indian Institute of Technology Hyderabad.

Swarnalatha, Veerla and Rao, Avvaru Venkata Narasimha and Pal, Prem (2019) Silicon Etching Characteristics in Modified TMAH Solution. In: 19th International Workshop on Physics of Semiconductor Devices, IWPSD, 11-15 December 2017, New Delhi, India.

Vismaya, K T and Pal, Prem (2019) A Simple Model to Explain High Speed Etching of Silicon in NH2OH-added Alkaline Solutions. Masters thesis, Indian institute of technology Hyderabad.

Satya Srinivas, Bokka and Swarnalatha, Veerla and Rao, Avvaru Venkata Narasimha and Pal, Prem (2019) Study of Cutting-Edge AFM Modalities and SEM Techniques in Determining Surface Parameters of Si{111} Wafer. In: 19th International Workshop on Physics of Semiconductor Devices, IWPSD, 11-15 December 2017, New Delhi, India.

Gupta, Arti and Pal, Prem and Sharma, Chandra Shekhar (2019) Surface Texturing of Silicon {100} in an Extremely Low Concentration TMAH for Minimized Reflectivity. ECS Journal of Solid State Science and Technology, 8 (10). P622-P628. ISSN 2162-8769

Veerla, Swarnalatha and Pal, Prem (2019) TMAH Based High Speed Silicon Bulk Micromachining for MEMS. PhD thesis, Indian Institute of Technology Hyderabad.

Akarapu, Ashok and P, Manoj Kumar and Singh, Sajal Sagar and P, Raju and Pal, Prem and Pandey, Ashok Kumar (2018) Achieving wideband micromechanical system using coupled non-uniform beams array. Sensors and Actuators A: Physical, 273. pp. 12-18. ISSN 0924-4247

Akarapu, Ashok and Gangele, Aparna and Pal, Prem and Pandey, Ashok Kumar (2018) An Analysis of Stepped Trapezoidal Shaped Microcantilever beams for MEMS based Devices. Journal of Micromechanics and Microengineering. ISSN 0960-1317

Akarapu, Ashok and Sahu, Nagesh Kumar and Pal, Prem and Pandey, Ashok Kumar (2018) Arrow Shaped Microcantilever Beams for Enhancing Mass Sensitivity. In: IEEE SENSORS, 28-31 October 2018, New Delhi.

Ashok, Akarapu and Sahu, Nagesh Kumar and Pal, Prem and Pandey, Ashok Kumar (2018) Arrow Shaped Microcantilever Beams for Enhancing Mass Sensitivity. IEEE Sensors. pp. 1-4. ISSN 1930-0395

Pandey, Ashok Kumar and Swarnalatha, Veerla and Pal, Prem and et al, . (2018) Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern. Micro and Nano Systems Letters, 6 (1). pp. 1-9. ISSN 2213-9621

Narasimha Rao, Avvaru Venkata and Swarnalatha, Veerla and Pandey, Ashok Kumar and Pal, Prem (2018) Determination of precise crystallographic directions on Si{111} wafers using self-aligning pre-etched pattern. Micro and Nano Systems Letters, 6 (1). ISSN 2213-9621

Rajagopal, Amirtham and Nair, Dipin K and Singh, Sajal Sagar (2018) Dynamic analysis of microbeams based on modified strain gradient theory using differential quadrature method. European Journal of Computational Mechanics, 27 (3). pp. 187-203. ISSN 1779-7179

Singh, Sajal Sagar and Nair, Dipin K and Rajagopal, Amirtham and et al, . (2018) Dynamic analysis of microbeams based on modified strain gradient theory using differential quadrature method. European Journal of Computational Mechanics, 27 (3). pp. 187-203. ISSN 1779-7179

V, Swarnalatha and Rao, A V N and Pal, Prem (2018) Effective improvement in the etching characteristics of Si{110} in low concentration TMAH solution. Micro and Nano Letters, 13 (8). pp. 1085-1089. ISSN 1750-0443

Rao, Avvaru Venkata Narasimha and Swarnalatha, Veerla and Pandey, Ashok kumar and Pal, Prem (2018) Microstructures with Protected Convex Corners in Modified KOH Solution Exhibiting High-Speed Silicon Etching. IEEE Sensors. pp. 1-4. ISSN 1930-0395

Ashok, Akarapu and P, Manoj Kumar and Pal, Prem and Pandey, Ashok Kumar (2018) An idea of oscillating alphabets through mechanical coupling. ISSS Journal of Micro and Smart Systems. pp. 1-6. ISSN 2509-7989

Rao, Avvaru Venkata Narasimha and Swarnalatha, Veerla and Ashok, Akarapu and Singh, Sajal Sagar and Pal, Prem (2017) Effect of NH2OH on Etching Characteristics of Si{100} in KOH Solution. ECS Journal of Solid State Science and Technology, 6 (9). pp. 609-614. ISSN 2162-8769

Narasimha Rao, A V and Swarnalatha, Veerla and Pal, Prem (2017) Effect of Surfactant and Alcohol Additives on Etching Characteristics in Aqueous Potassium Hydroxide Solutions. ECS Transactions, 77 (11). pp. 1761-1769. ISSN 1938-6737

Rao, A V N and Swarnalatha, V and Pal, Prem (2017) Etching characteristics of Si{110} in 20 wt% KOH with addition of hydroxylamine for the fabrication of bulk micromachined MEMS. Micro and Nano Systems Letters, 518 (23). ISSN 2213-9621

Swarnalatha, V and Narasimha Rao, A V and Ashok, A and Singh, S S and Pal, Prem (2017) Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer. Journal of Micromechanics and Microengineering, 27 (8). 085003. ISSN 0960-1317

Swarnalatha, Veerla and Narasimha Rao, A V and Pal, Prem (2017) Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH 2 ΟΗ. ECS Transactions, 77 (11). pp. 1737-1745. ISSN 1938-6737

Pal, Prem and Sato, K (2017) Silicon Wet Bulk Micromachining for MEMS. CRC Press. ISBN 9789814613729

Akarapu, A and Pal, Prem (2017) Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm. Microsystem Technologies, 23 (1). pp. 47-54. ISSN 0946-7076

Singh, S S and Avvaru, V N and Veerla, S and Pandey, Ashok Kumar and Pal, Prem (2017) A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer. Microsystem Technologies, 23 (6). pp. 2131-2137. ISSN 0946-7076

Singh, S S and Pal, Prem and Pandey, Ashok Kumar and Xing, Y and Sato, K (2016) Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS. Micro and Nano Systems Letters, 4 (5). pp. 1-29. ISSN 2213-9621

Gosalvez, M A and Li, Y and Ferrando, N and Pal, Prem and Sato, K and Xing, Y (2016) Fluctuations During Anisotropic Etching: Local Recalibration and Application to Si{110}. Journal of Microelectromechanical Systems, 25 (4). pp. 788-798. ISSN 1057-7157

Singh, Sajal Sagar and Pal, Prem and Pandey, Ashok Kumar (2016) Highly sensitive microelectromechanical mass sensor with non-uniform beams. In: 13th International workshop on nanomechanical sensing, 22-24 June 2016, Delft, The Netherlands.

Vadnala, S and Asthana, Saket and Pal, Prem (2016) Investigation of near room temperature magnetocaloric, magnetoresistance and bolometric properties of Nd0.5La0.2Sr0.3MnO3: Ag2O manganites. Journal of Materials Science: Materials in Electronics, 27 (6). pp. 6156-6165. ISSN 0957-4522

Akarapu, A and Pal, Prem (2016) Investigation of room temperature deposited silicon dioxide thin films for surface texturisation of monocrystalline {100} silico. Micro and Nano Letters, 11 (1). pp. 62-66. ISSN 1750-0443

Singh, S S and Pal, Prem and Pandey, Ashok Kumar (2016) Mass Sensitivity of Nonuniform Microcantilever Beams. Journal of Vibration and Acoustics, 138 (6). ISSN 1048-9002

Singh, S G and Veerla, S and Sharma, Vandana and Pandey, Ashok Kumar and Pal, Prem (2016) Precise identification of < 1 0 0 > directions on Si{001} wafer using a novel self-aligning pre-etched technique. Journal of Micromechanics and Microengineering, 26 (2). ISSN 0960-1317

Singh, S S and Veerla, S and Sharma, Vandana and Pandey, Ashok Kumar and Pal, Prem (2016) Precise identification of <1 0 0> directions on Si{0 0 1} wafer using a novel self-aligning pre-etched technique. Journal of Micromechanics and Microengineering, 26 (2). ISSN 0960-1317

Pal, Prem and Akarapu, A and Haldar, S and Xing, Y and Sato, K (2015) Anisotropic etching in low-concentration KOH: Effects of surfactant concentration. Micro and Nano Letters, 10 (4). pp. 224-228. ISSN 1750-0443

Muttannavar, R and Pal, Prem (2015) Anodic Silicon Dioxide as a Mask Material for the Fabrication of Microstructures in Surfactant Added TMAH. Masters thesis, Indian Institute of Technology Hyderabad.

Pal, Prem and Sato, K (2015) A Comprehensive Review on Convex and Concave Corners in Silicon Bulk Micromachining based on Anisotropic Wet Chemical Etching. Micro and Nano Systems Letters, 3 (6). pp. 1-42. ISSN 2213-9621 (Submitted)

Vadnala, S and Asthana, Saket and Pal, Prem and S, Srinath (2015) Effect of A-site ionic size variation on TCR and electrical transport properties of (Nd0.7-xLax)0.7Sr0.3MnO3 with x = 0, 0.1 and 0.2. IOP Conference Series: Materials Science and Engineering, 73. pp. 1-5. ISSN 1757-8981

Vadnala, S and Pal, Prem and Asthana, S (2015) Influence of A-site cation disorder on structural and magnetocaloric properties of Nd0.7–xLaxSr0.3MnO3 (x=0.0, 0.1, 0.2 & 0.3). Journal of Rare Earths, 33 (10). pp. 1072-1080. ISSN 1002-0721

Akarapu, A and Pal, Prem (2015) Investigation of anodic silicon dioxide thin films for microelectromechanical systems applications. Micro and Nano Letters, 9 (12). pp. 830-834. ISSN 1750-0443

Li, Y and Gosalvez, M A and Pal, Prem and Sato, K and Xing, Y (2015) Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching. Journal of Micromechanics and Microengineering, 25 (5). ISSN 0960-1317

Singh, S S and Pal, Prem and Pandey, Ashok Kumar (2015) Pull-in analysis of non-uniform microcantilever beams under large deflection. Journal of Applied Physics, 118. pp. 1-10. ISSN 0021-8979

Zhang, H and Xing, Y and Gosalvez, M A and Pal, Prem and Sato, K (2015) Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives. Sensors and Actuators A: Physical, 233. pp. 451-459. ISSN 0924-4247

Akarapu, A and Pal, Prem (2015) Room temperature synthesis of silicon dioxide thin films for MEMS and silicon surface texturing. In: Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference, 18-22 January, 2015, Estoril, Portugal.

Das, K C and Ghosh, S P and Tripathy, N and Bose, G and Ashok, A and Pal, Prem and Kim, D H and Lee, T I and Myoung, J M and Kar, J P (2015) Surface and interface studies of RF sputtered HfO2 thin films with working pressure and gas flow ratio. Journal of Materials Science: Materials in Electronics, 26 (8). pp. 6025-6031. ISSN 0957-4522

Akarapu, A and Pal, Prem (2015) Synthesis of anodic oxide thin films on Si{100}wafers and their characterization in TMAH for MEMS. ECS Journal of Solid State Science and Technology, 4 (2). Q1-Q7. ISSN 2162-8769

Pal, Prem and Gosalvez, M A and Sato, K and Hida, H and Xing, Y (2014) Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners. Journal of Micromechanics and Microengineering, 24 (12). ISSN 0960-1317

Singh, S S and Li, Y and Xing, Y and Pal, Prem (2014) The Application of Level Set Method for Simulation of PECVD/LPCVD Processes. In: Physics of Semiconductor Devices: 17th International Workshop on the Physics of Semiconductor Devices 2013. Environmental Science and Engineering . Springer International Publishing, pp. 239-242. ISBN 978-3-319-03001-2

Vadnala, S and Asthana, Saket and Pal, P (2014) Enhanced TCR with Room Temperature TMI for Potential Application in Microbolometer. In: Physics of Semiconductor Devices. Environmental Science and Engineering . Springer International Publishing, pp. 499-501. ISBN 9783319030012

Haldar, S and Ashok, A and Pal, Prem (2014) An Experimental Investigation of The Appearance Of Different Planes At Convex Corner In TMAH And KOH Solutions. In: 2nd International Conference on Advance Trends in Engineering and Technology (ICATET-2014), 18-19 April 2014, Jaipur Rajasthan, India.

Sudharshan, V and Asthana, Saket and Pal, Prem (2014) Experimental Investigation on High TCR Manganites at Room Temperature for Uncooled Microbolometer Applications. In: International Conference on Advance Trends in Engineering & Technology (ICATET-2014), 18-19 April 2014, Jaipur Rajasthan, India.

Kumar, Aashish and Pal, Prem (2014) Growth and Characterization of Silicon Dioxide Thin Films Developed by Anodic Oxidation. Masters thesis, Indian Institute of Technology, Hyderabad.

Ashok, A and Pal, Prem (2014) Growth and etch rate study of low temperature anodic silicon dioxide thin films. Scientific World Journal, 2014. pp. 1-10. ISSN 2356-6140

Akarapu, A and Pal, Prem (2014) Optical Characterization of Anodically Grown Silicon Dioxide Thin Films. In: Physics of Semiconductor Devices: 17th International Workshop on the Physics of Semiconductor Devices 2013. Environmental Science and Engineering . Springer International Publishing, Switzerland, pp. 437-440. ISBN 9783319030029

Singh, S S and Li, Y and Pal, Prem and et al, . (2014) Simulation of thin film deposition profile on complex 2-D MEMS Structures. In: 7th Asia-pacific Conference on Transducers and Micro-Nano Technology(APCOT), 29 June-2 July 2014, Daegu Korea.

Tang, B and Yao, M and Tan, G and Pal, Prem and Sato, K and Su, W (2014) Smoothness Control of Wet Etched Si{100} Surfaces In TMAH+Triton. In: Key Engineering Materials, 3-6, November 2013, Tianjin; China.

A, Ashok and Pal, Prem (2014) Study of anodically grown silicon dioxide thin film in TMAH. In: 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), 29th June to 2nd July, 2014, Daegu, Korea.

Vadnala, S and Durga Rao, T and Pal, Prem and Asthana, S (2014) Study of structural effect on Eu-substituted LSMO manganite for high temperature coefficient of resistance. Physica B: Condensed Matter, 448. pp. 277-280. ISSN 0921-4526

Ashok, A and Premee, S and Pal, Prem (2014) Surface Texturing of Si{100} using TMAH with Different Concentrations for Solar Cells. In: 2nd International Conference on Advance Trends in Engineering and Technology (ICATET-2014), 18-19 April 2014, Jaipur Rajasthan, India.

Pal, Prem and Haldar, S and Singh, S S and Ashok, A and Yan, X and Sato, K (2014) A detailed investigation and explanation of the appearance of different undercut profiles in KOH and TMAH. Journal of Micromechanics and Microengineering, 24 (9). ISSN 0960-1317

Li, Y and Xing, Y and Gosalvez, M A and Pal, Prem and Zhou, Y (2013) Particle Swarm Optimization of Model Parameters: Simulation of Deep Reactive Ion Etching by the Continuous Cellular Automaton. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS, 16-20 June 2013, Barcelona; Spain;.

Pal, Prem and Gosalvez, M A and Sato, K (2012) Etched profile control in anisotropic etching of silicon by TMAH+Triton. Journal of Micromechanics and Microengineering, 22 (6). ISSN 0960-1317

Pal, Prem and Sato, K and Hida, H (2012) MEMS components with perfectly protected edges and corners in Si{110} wafers. In: Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, 6-9, November 2012, Nagoya; Japan.

Gosalvez, M A and Pal, Prem and Ferrando, N and Hida, H and Sato, K (2011) Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples. Journal of Micromechanics and Microengineering, 21 (12). pp. 1-14. ISSN 0960-1317

Pal, Prem and Sato, K and Gosalvez, M A and Tang, B and Hida, H and Shikida, M (2011) Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution. Journal of Micromechanics and Microengineering, 21 (1). ISSN 0960-1317

Pal, Prem and Sato, Kazuo and Hida, H and et al, . (2011) MEMS Components with Perfectly Protected Edges and Comers in Si{110} Wafers. In: IEEE International Symposium on MHS & Micro-Nano G-COE, 6-9 November 2011, Nagoya, Japan..

Goslvez, M A and Pal, Prem and Sato, K (2011) Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {100}, {110} and {111} surfaces. Journal of Micromechanics and Microengineering, 21 (10). ISSN 0960-1317

Gosalvez, M A and Pal, Prem and Ferrando, N and Sato, K (2011) Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples. Journal of Micromechanics and Microengineering, 21 (12). ISSN 0960-1317

Goslvez, M A and Ferrando, N and Xing, Y and Pal, Prem and Sato, K and Cerda, J and Gadea, R (2011) Simulating anisotropic etching of silicon in any etchant: Evolutionary algorithm for the calibration of the continuous cellular automaton. Journal of Micromechanics and Microengineering, 21 (6). ISSN 0960-1317

Tang, B and Shikida, M and Pal, Prem and Amakawa, H and Hida, H and Fukuzawa, K (2010) Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining. Journal of Micromechanics and Microengineering, 20 (6). ISSN 0960-1317