Electromechanical Modelling of Ring Type of MEMS Gyroscopes

Samanta, Sunrit and Pandey, Ashok Kumar (2022) Electromechanical Modelling of Ring Type of MEMS Gyroscopes. In: Virtual Seminar on Applied Mechanics, VSAM 2021, 28 May 2021 through 29 May 2021, Virtual, Online.

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Abstract

A new mathematical model for the combined slanting and scalloping defect, seen in the microelectromechanical systems (MEMS), has been suggested. This defect is observed in the high aspect ratio systems that are generally manufactured using the ‘Bosch Process’. Prior to this, the analytical model of a vibratory ring gyroscope (VRG), including the nonlinear terms, is delved into, considering the outer thin ring resonator. Its linear form is compared and analyzed with the finite element analysis in ANSYS. The impact of the aforesaid defect on the dynamics of a VRG is plotted with the help of MATLAB, applying the linear form of the expressions. © 2022, The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

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IITH Creators:

IITH Creators	ORCiD
Pandey, Ashok Kumar	https://orcid.org/0000-0002-5878-6451

Item Type:

Conference or Workshop Item (Paper)

Additional Information:

Acknowledgements I, Sunrit Samanta, acknowledge the Ministry of Education (MoE), formerly known as the Ministry of Human Resource Development (MHRD), New Delhi, India, for the fellowship provided to me for pursuing master of technology from Indian Institute of Technology Hyderabad.

Uncontrolled Keywords:

Combined slanting and scalloping; MEMS; Vibratory ring gyroscope

Subjects:

Physics > Mechanical and aerospace

Divisions:

Department of Material Science Engineering

Depositing User:

. LibTrainee 2021

Date Deposited:

20 Jul 2022 12:31

Last Modified:

20 Jul 2022 12:31