Modeling of Contact and Stiction in Electrostatic Microcantilever Actuators

Vyasarayani, C P and Abdel-Rahman, E M and McPhee, J (2012) Modeling of Contact and Stiction in Electrostatic Microcantilever Actuators. Journal of Nanotechnology in Engineering and Medicine, 3 (1). pp. 1-8. ISSN 1949-2944

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Abstract

A dynamic model of a microcantilever actuator is developed to simulate the events of contact, impact, stiction, and pull-off from the substrate. The model accounts for geometric, electrostatic, adhesive, and contact nonlinearities. The model is validated by comparison to experimental data and other analytical model predictions. We find that microcantilever electrostatic microelectromechanical (MEMS) actuators can exhibit bistable and tristable equilibrium configurations. We also find that the transients subsequent to pull-in play an important role in determining whether or not stiction will occur

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IITH Creators:

IITH Creators	ORCiD
Vyasarayani, Chandrika Prakash	http://orcid.org/0000-0002-3396-0484

Item Type:

Article

Uncontrolled Keywords:

Bistables; Contact nonlinearity; Equilibrium configuration; Experimental data; Micro-cantilever actuators; Micro-cantilevers; Micro-electro-mechanical; Model prediction; Pull-in; Pull-off

Subjects:

Physics > Mechanical and aerospace

Divisions:

Department of Mechanical & Aerospace Engineering

Depositing User:

Team Library

Date Deposited:

18 Nov 2014 03:23

Last Modified:

04 Mar 2022 05:36

URI:

http://raiithold.iith.ac.in/id/eprint/809