M A, Somashekara and Banerjee, Raja
(2011)
Numerical Simulation of Spin Coating Process for Circular Disc.
Masters thesis, Indian Institute of Technology Hyderabad.
Abstract
The process of applying a uniform thin film on a horizontal substrate is
called spin coating. Spin coating relatively used in several industrial and
scientific applications. In this study an attempted was made to numerically
study the various factors affecting the spin coating process.
CFD simulations were performed on 2D axisymetric geometry, VOF
multiphase model was used to its work the liquid/gas interface, results from
isothermal CFD simulation were first validated against theoretical values.
Subsequently, CFD simulations were performed to determine the effects of
flow important parameters. Parametric study was a alone to see the effect of
spin, thermo viscosity and thermo capillary on spin coating process.
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