Superior Work Function Variability Performance of Horizontally Stacked Nanosheet FETs for Sub-7-nm Technology and Beyond

Sudarsanan, Akhil and Venkateswarlu, Sankatali and Nayak, Kaushik (2020) Superior Work Function Variability Performance of Horizontally Stacked Nanosheet FETs for Sub-7-nm Technology and Beyond. In: 4th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference, 16 – 18 March 2020, Penang, Malaysia.

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IITH Creators:	IITH Creators ORCiD Nayak, Kaushik UNSPECIFIED
Item Type:	Conference or Workshop Item (Paper)
Subjects:	Electrical Engineering
Divisions:	Department of Electrical Engineering
Depositing User:	Team Library
Date Deposited:	24 Dec 2019 09:44
Last Modified:	24 Dec 2019 09:44
URI:	http://raiithold.iith.ac.in/id/eprint/7249
Publisher URL:
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