An Experimental Investigation of The Appearance Of Different Planes At Convex Corner In TMAH And KOH Solutions

Haldar, S and Ashok, A and Pal, Prem (2014) An Experimental Investigation of The Appearance Of Different Planes At Convex Corner In TMAH And KOH Solutions. In: 2nd International Conference on Advance Trends in Engineering and Technology (ICATET-2014), 18-19 April 2014, Jaipur Rajasthan, India.

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Abstract

In wet anisotropic etching, the etched profile of undercut convex corners depends on the type of etchant. A significant amount of research has been carried out to explain the convex corner undercutting and the identification of undercut planes at convex corner. However, it is not clearly explained that why different shapes undercut corners appears in different etchants. In this work, corner undercutting on {100} wafer surface is thoroughly investigated. The undercutting behaviour is examined in two different kinds of etchants namely KOH and TMAH. The study is performed by analyzing the etching characteristics of different kinds of convex corners in mask patterns. One type of corner in mask patterns is formed by <110> directions, while others types are formed by the same directions which shapes the undercut convex corner.

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IITH Creators:	IITH Creators ORCiD Pal, Prem UNSPECIFIED
Item Type:	Conference or Workshop Item (Paper)
Subjects:	Physics
Divisions:	Department of Physics
Depositing User:	Library Staff
Date Deposited:	13 Sep 2019 11:24
Last Modified:	13 Sep 2019 11:24
URI:	http://raiithold.iith.ac.in/id/eprint/6251
Publisher URL:	https://www.researchgate.net/publication/296112821...
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