Area Effective Silicon Micro Structure Only Using Front End Bulk Micro Machining

Mohanty, R and Karthik, C and Singh, Shiv Govind and et al, . (2014) Area Effective Silicon Micro Structure Only Using Front End Bulk Micro Machining. In: ICMEMS 2014, 18-20 December 2014, Chennai, India.

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IITH Creators:	IITH Creators ORCiD Singh, Shiv Govind http://orcid.org/0000-0001-7319-879X
Item Type:	Conference or Workshop Item (Paper)
Subjects:	Electrical Engineering
Divisions:	Department of Electrical Engineering
Depositing User:	Library Staff
Date Deposited:	12 Sep 2019 09:57
Last Modified:	12 Sep 2019 09:57
URI:	http://raiithold.iith.ac.in/id/eprint/6211
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