Free Standing, Ultra-smooth, Sacrificial Layer Independent SU-8 Membranes for MEMS applications

Joseph, J and G D V, Santhosh Kumar and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2015) Free Standing, Ultra-smooth, Sacrificial Layer Independent SU-8 Membranes for MEMS applications. In: 18th International Workshop on Physics of Semiconductor Devices (IWPSD), 7-10 December 2015, Bangalore, India.

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Abstract

After this step, hide the region of contact pads with opaque tape and perform flood exposure to UV light, followed by post exposure bake, development and hard bake. Finally, we explored a new way of releasing mechanism without the aid of sacrificial layer [11] where the SU8 film with pyramid shaped gold sputtered electrodes can be released using standard NH 4 OH solution at a temperature of around 70 0 C for a duration of 2 hours. After the release step, we can use the same silicon mold again to make a number of replicas of the device.

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IITH Creators:	IITH Creators ORCiD Singh, Shiv Govind http://orcid.org/0000-0001-7319-879X Vanjari, Siva Rama Krishna UNSPECIFIED
Item Type:	Conference or Workshop Item (Paper)
Subjects:	Electrical Engineering
Divisions:	Department of Electrical Engineering
Depositing User:	Team Library
Date Deposited:	27 Jun 2019 07:26
Last Modified:	27 Jun 2019 07:26
URI:	http://raiithold.iith.ac.in/id/eprint/5574
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