Reliable MOSFET operation using two-phase microfluidics in the presence of high heat flux transients

Singh, Shiv Govind and Agrawal, A and Duttagupta, S P (2011) Reliable MOSFET operation using two-phase microfluidics in the presence of high heat flux transients. Journal of Micromechanics and Microengineering, 21 (10). ISSN 0960-1317

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Abstract

Randomly generated heat flux transients affect the reliability of advanced integrated circuits and can induce severe nonlinearity in the device response, resulting in the degradation of a gate dielectric in metal oxide field effect transistors (MOSFETs). The effect of high heat flux transients on MOSFET operation and mitigation, using single-phase and two-phase on-chip microfluidics, is reported in this paper. A prototype comprising monolithically integrated MOSFETs, resistance temperature detector (RTD) arrays, simulated transient source (microheaters) and microfluidic networks was developed. The application of a 10 s transient (153 W cm-2) led to the degradation of subthreshold swing (S) from 120 to 240 mV/decade. However, in the presence of water flow, effective mitigation of S (up to 75%) is observed. The rate of mitigation is higher at lower flow rates because of the higher heat-transfer efficiency for two-phase flow. Thus, an appropriate selection of flow parameters can lead to optimized cooling. Additionally, we propose a strategy to localize the transient heat sources based on the temperature profiles generated using an on-chip, distributed RTD sensor array. The proposed methodology can be applied in practical integrated circuits for localization and characterization of heat sources leading to modifications in the circuit design or process integration steps.

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IITH Creators:

IITH Creators	ORCiD
Singh, Shiv Govind	http://orcid.org/0000-0001-7319-879X

Item Type:

Article

Uncontrolled Keywords:

Circuit designs; Device response; Flow parameters; Heat sources; High heat flux; Metal oxide field effect transistors; Micro-heaters; Microfluidic networks; Monolithically integrated; MOS-FET; MOSFETs; On chips; On-chip microfluidics; Presence of water; Process integration; Resistance temperature detectors; Severe nonlinearity; Simulated transients; Subthreshold swing; Temperature profiles; Transient heat

Subjects:

Electrical Engineering
Physics > Electricity and electronics

Divisions:

Department of Electrical Engineering

Depositing User:

Team Library

Date Deposited:

30 Oct 2014 05:47

Last Modified:

16 Jan 2019 09:07

URI:

http://raiithold.iith.ac.in/id/eprint/536