A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications

Joseph, J and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2014) A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications. In: 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC, 26-30 August 2014, Chicago; United States.

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Abstract

In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs. We also propose a simple state-of-the-art fabrication methodology for the same. As compared to the standard Silicon Nitride CMUTs, the proposed structure gives the same electromechanical coupling coefficient with lower membrane dimensions and low pull-in voltage which in turn results in reduced area and power consumption. Moreover the proposed fabrication methodology is a low temperature process which makes it CMOS compatible.

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IITH Creators:	IITH Creators ORCiD Singh, Shiv Govind http://orcid.org/0000-0001-7319-879X Vanjari, Siva Rama Krishna UNSPECIFIED
Item Type:	Conference or Workshop Item (Paper)
Uncontrolled Keywords:	biomedical ultrasonics, ultrasonic imaging, ultrasonic transducers
Subjects:	Others > Electricity Physics > Electricity and electronics
Divisions:	Department of Electrical Engineering
Depositing User:	Team Library
Date Deposited:	05 Jun 2015 05:38
Last Modified:	16 Jan 2019 10:49
URI:	http://raiithold.iith.ac.in/id/eprint/1559
Publisher URL:	https://doi.org/10.1109/EMBC.2014.6943861
Related URLs:	Google Scholar

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