Comparative study of perforated microcantilevers for MEMS applications

Purohit, Soumya and Pal, Prem and Pandey, Ashok Kumar (2021) Comparative study of perforated microcantilevers for MEMS applications. In: 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 25 August 2021 through 27 August 2021, Paris.

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Abstract

In this paper, the circular, square and hexagonal perforations of size 2.5 μm-14.5 μm are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease. Among all the proposed designs, design with hexagonal perforation has the highest resonance frequency of 34.5 kHz. Static deflection is found to be greater in beams with circular perforations. Beam with square perforations has the lowest pull-in voltage of 3.84 V. © 2021 IEEE.

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IITH Creators:	IITH Creators ORCiD Pal, Prem https://orcid.org/0000-0001-7345-9769 Pandey, Ashok Kumar https://orcid.org/0000-0002-5878-6451
Item Type:	Conference or Workshop Item (Paper)
Additional Information:	Soumya Purohit acknowledge the Ministry of Education for providing the fellowship. The work is partially supported by DRDO and CSIR.
Uncontrolled Keywords:	cantilever; MEMS; perforations
Subjects:	Physics > Mechanical and aerospace Physics
Divisions:	Department of Mechanical & Aerospace Engineering Department of Physics
Depositing User:	. LibTrainee 2021
Date Deposited:	08 Aug 2022 10:18
Last Modified:	08 Aug 2022 10:18
URI:	http://raiithold.iith.ac.in/id/eprint/10149
Publisher URL:	http://doi.org/10.1109/DTIP54218.2021.9568667
Related URLs:	Author Google Scholar

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